发明名称 |
Device and method for separating a substrate from a carrier substrate |
摘要 |
Device for separating a substrate from a carrier substrate which is connected to the substrate by an interconnect layer. The device includes a carrier substrate holder with a holding surface for holding the carrier substrate, and a substrate holder which is located opposite the carrier substrate holder with a substrate holding surface which can be located parallel to the holding surface for accommodating the substrate. There are separating means for parallel displacement of the substrate relative to the carrier substrate in the interconnected state of the substrate and carrier substrate.
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申请公布号 |
US8449716(B2) |
申请公布日期 |
2013.05.28 |
申请号 |
US201013265035 |
申请日期 |
2010.03.31 |
申请人 |
WIMPLINGER MARKUS;LINDNER FRIEDRICH PAUL;EV GROUP GMBH |
发明人 |
WIMPLINGER MARKUS;LINDNER FRIEDRICH PAUL |
分类号 |
B32B38/00 |
主分类号 |
B32B38/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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