PARTICULATE FILM LAMINATING SYSTEM AND PARTICULATE FILM LAMINATING METHOD USING SAME

摘要

A particulate film laminating system includes: a nanoparticle generating chamber in which nanoparticles of a metal material are generated; a nanofiber generating chamber in which nanofibers of a resin material are generated; a laminating chamber in which the nanoparticles and the nanofibers are film-formed and laminated on a substrate; a nanoparticle film-forming region configured such that the nanoparticles are film-formed in the laminating chamber; a nanofiber film-forming region configured such that the nanofibers are film-formed in the laminating chamber; a moving unit which moves the substrate between the nanoparticle film-forming region and the nanofiber film-forming region; an exhaust unit which exhausts the laminating chamber; and a coolant-gas introduction unit which introduces coolant gas into each of the nanoparticle generating chamber and the nanofiber generating chamber.

主权项

1. A particulate film laminating system comprising:
a nanoparticle generating chamber in which a metal material to be heated is arranged and nanoparticles of the metal material are generated; a nanostructure generating chamber in which a resin material to be heated is arranged and nanostructures of the resin material are generated; a laminating chamber which is connected to the nanoparticle generating chamber and the nanostructure generating chamber respectively via a particle communication pipe and a structure body communication pipe, so as to enable the nanoparticles and the nanostructures to be film-formed and laminated on a substrate; a nanoparticle film-forming region configured such that the nanoparticles are film-formed in the laminating chamber; a nanostructure film-forming region configured such that the nanostructures are film-formed in the laminating chamber; a moving unit which moves the substrate between the nanoparticle film-forming region and the nanostructure film-forming region; an exhaust unit which exhausts the laminating chamber; and a coolant-gas introduction unit which introduces coolant gas into each of the nanoparticle generating chamber and the nanostructure generating chamber.