LITHIUM MICROBATTERY FABRICATION METHOD

摘要

The method for fabricating a lithium microbattery is performed from a stack of layers successively including: a first layer made from a first material, a second layer made from a second material, a solid electrolyte layer and a first electrode. The method further includes etching to form a first pattern made from the first material and a second pattern made from the second material, the second pattern defining a covered area and an uncovered area of the electrolyte layer. The uncovered area is then etched using the second pattern as etching mask. After etching of the first pattern, a lithium-based layer is formed on the second pattern, the lithium-based layer and the second pattern forming a second lithium-based electrode.

主权项

1. A fabrication method of a lithium microbattery, comprising the following successive steps:
providing a stack of layers successively comprising:
a first layer made from a first material;a second layer made from a second material configured to combine with the lithium atoms;a solid layer;a first electrode; etching of the first and second materials to form a first pattern made from the first material and a second pattern made from the second material, the second pattern defining an uncovered area and a covered area of the electrolyte layer; etching of the uncovered area of the electrolyte layer using the second pattern as etching mask, and etching of the first pattern; depositing in localized manner a lithium-based layer on the second pattern, the second material being configured such that the lithium atoms diffuse into the second pattern, the lithium-based layer and the second pattern forming a lithium-based second electrode.