| 摘要 |
PURPOSE:To optimize a combination of oil-free vacuum pumps by comparing in sequence respective three dimensional diagrams regarding plural sets of each oil-free vacuum pump with those of vacuum states concerning each exhausted room and seeking for an optimum combination satisfying the vacuum states of its exhausted room. CONSTITUTION:On the occasion of selecting oil-free vacuum pumps, a characteristic diagram where an ultimate vacuum (Torr) is plotted on a X axis, a pumping speed (m<3>/h) is on a Y axis, and an adaptive vacuum range is on a Z axis makes use of a method and the like on the basis of a computer-aided simulation analysis. In addition, in the case of a diagram indicating vacuum states required by processing room in a vacuum CVD device, the ultimate vacuum is plotted on the X axis, the pumping speed is on the Y axis, and the required vacuum variation range is on the Z axis respectively. Sbusequently, the characteristic diagram of pump is compared with a diagram indicating the vacuum states and data shown on the latter diagram are so limited to those shown on the former that the oil-free vaccum pumps are selected. This approach, therefore, makes it possible to select the oil-free vacuum pumps properly and easily.
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