| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultra-broadband ultraviolet (UV) catadioptric imaging microscope system with a wide-range zoom capability.SOLUTION: A microscope system, which comprises a catadioptric lens group and a zooming tube lens group 139, has high optical resolution in a deep UV wavelength, continuously adjustable magnification, and a high numerical aperture. The system integrates microscope modules such as objectives, tube lenses and zoom optics to reduce the number of components, and to simplify a system manufacturing process. By combining with an all-refractive zooming tube lens, excellent image quality across a very broad deep ultraviolet spectral range can be obtained, The zooming tube lens is modified to compensate for higher-order chromatic aberrations that normally limit performance. |
