EXPOSURE APPARATUS, METHOD FOR ASSEMBLING THE SAME AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an exposure apparatus capable of improving safety.SOLUTION: An exposure apparatus for forming a pattern on a substrate by irradiation of an energy beam comprises: an exposure apparatus body including a plate stage for holding and moving the substrate; a chamber for surrounding the exposure apparatus body; and safety fences SR-SRarranged in the intermediate between the exposure apparatus body and the chamber so that an entering person in the chamber cannot contact with the exposure apparatus body. The safety fences SR-SRare formed so that the entering person can view the exposure apparatus body in operation through the safety fences SR-SR.