发明名称 WAFER GRADING AND SORTING FOR PHOTOVOLTAIC CELL MANUFACTURE
摘要 <p>Methods and systems are presented for analysing samples of a semiconductor material, such as silicon wafers useful for manufacturing photovoltaic cells, for the purpose of assigning grades to the samples, and optionally sorting them into quality bins. The samples are subjected to a photoluminescence-based analysis and at least one non-photoluminescence-based analysis, and the data processed to obtain information on one or more sample properties. The samples are then graded, and optionally sorted, based on these one or more properties. In preferred embodiments the grades are indicative of the performance of photovoltaic cells to be manufactured from the samples.</p>
申请公布号 EP2801107(A4) 申请公布日期 2015.12.16
申请号 EP20120848635 申请日期 2012.11.07
申请人 BT IMAGING PTY LTD 发明人 TRUPKE, THORSTEN;KROEZE, ROGER
分类号 H01L21/66;B07C5/34;B07C5/342;G01N21/63;G01N21/64;G01N21/95;H01L31/18;H02S50/10 主分类号 H01L21/66
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