发明名称 CLEANING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cleaning device which reliably cleans a peripheral end side surface of a cleaned body even when a contour of the cleaned body is not a perfect circle.SOLUTION: A cleaning device 1 of the invention includes: a support body 20 which supports a cleaned body 10; a main surface brush 30 which contacts with a main surface 10a of the cleaned body 10 supported on the support body 20 and rotates to clean the main surface 10a; a side surface brush 35 which contacts with a peripheral edge side surface 10b of the cleaned body 10 to clean the side surface 10b; and a biasing mechanism 50 which constantly biases the side surface brush 35 toward a center O of the cleaned body 10.
申请公布号 JP2015225945(A) 申请公布日期 2015.12.14
申请号 JP20140109738 申请日期 2014.05.28
申请人 TECHNICALFIT CORP 发明人 KOBAYASHI TOMOAKI
分类号 H01L21/304;A46B13/02;H01L21/683 主分类号 H01L21/304
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