| 摘要 |
The present invention relates to a transfer module capable of transferring multiple substrates rapidly and accurately via a simple configuration, and to a substrate processing apparatus including the same. The transfer module comprises: a transfer frame arranged inside a process chamber; a transfer stage installed on the transfer frame to be able to move vertically; a transfer fork part installed on the transfer stage to be able to move back and forth and capable of having the substrates mounted thereon; and a driving assembly for moving the transfer fork part back and forth. The driving assembly includes: a transfer driving part; a transfer shaft installed on the transfer frame to be able to rotate, extending in a vertical direction and rotated by the transfer driving part; a power transmission part combined with the transfer shaft to be able to move in a vertical direction, moving together with the transfer stage, and combined to rotate together with the transfer shaft; and a power conversion part for moving the transfer fork part forward or backward depending on the rotating direction of the power transmission part by connecting the power transmission part to the transfer fork part. |
