HOT GAS REFRIGERANT HEAT EXCHANGING CHILLER AND HOT GAS MIXER FOR SEMICONDUCTOR PROCESS EQUIPMENT

摘要

The present invention relates to a chiller apparatus of equipment for a semiconductor process, as a direct cooling type chiller apparatus wherein a supply line of a freezing cycle is connected by a heat exchanger in the equipment instead of an evaporator, and a recollection line is connected to a compressor, which additionally comprises: a hot gas recollection line which is connected to an output terminal of an electronic expansion valve through a hot gas supply means of an external uniform pressure type to balance pressure of the recollection line and pressure of a spring of a valve by branching off hot gas discharged from the compressor; and a hot gas mixing apparatus for mixing output gas from an electronic expansion valve at an output terminal of the electronic expansion valve with the hot gas supplied by the hot gas supply means. Therefore, a temperature adjustment reaction speed is increased and temperature control can be precisely conducted since gas is rapidly and uniformly mixed by the gas mixing apparatus.