IMPEDANCE MATCHING SLUG, IMPEDANCE MATCHING DEVICE, ELECTROMAGNETIC WAVE TRANSMISSION DEVICE, ELECTROMAGNETIC WAVE RADIATION DEVICE, AND PLASMA PROCESSING APPARATUS

摘要

The present invention provides a slug capable of expanding a matchable load input impedance range compared with a slug entirely constituted by a dielectric. The slug (60) is installed in a waveguide for transmitting an electromagnetic wave supplied from an electromagnetic wave supply source to a load, in order to perform an impedance matching process between an output impedance of the electromagnetic wave supply source and an input impedance of the load. The waveguide includes a cylindrical outer conductor and an inner conductor which is coaxial to the outer conductor, and which is installed inside the outer conductor. The slug (60) is installed to be axially movable between the outer conductor and the inner conductor. The slug (60) includes a cylindrical first part (61) and a cylindrical second part (62) which are coupled to each other. The second part (62) is disposed in the outside of the first part (61) so that an inner circumferential surface of the second part (62) is in contact with an outer circumferential surface of the first part (61). The first part (61) is constituted by a conductor and the second part (62) is constituted by a dielectric.