| 发明名称 |
Broadband Light Source Including Transparent Portion with High Hydroxide Content |
| 摘要 |
A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm. |
| 申请公布号 |
US2015357179(A1) |
申请公布日期 |
2015.12.10 |
| 申请号 |
US201514699781 |
申请日期 |
2015.04.29 |
| 申请人 |
KLA-Tencor Corporation |
发明人 |
Wilson Lauren;Chimmalgi Anant;Panzer Matthew;Bezel Ilya |
| 分类号 |
H01J61/30;H05G2/00;H01J65/04 |
主分类号 |
H01J61/30 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A broadband light source comprising:
a lamp configured to contain a volume of gas, the lamp including one or more transparent portions being at least partially transparent to at least a portion of broadband radiation generated within a volume of the lamp, wherein the one or more transparent portions are formed from a transparent material having a hydroxide (OH) content above 700 ppm. |
| 地址 |
Milpitas CA US |
