| 摘要 |
A liquid immersion device (132) has an mixing mechanism that mixes and dissolves a predetermined substance for adjusting specific resistance of a liquid, which is supplied onto a liquid repellent film on the surface of an object (member) arranged on the light emitting side of a projection optical system (PL), and an liquid immersion area is formed by supplying a liquid (Lq) in which the predetermined substance is dissolved onto the liquid repellent film. |
