发明名称 インプリント用硬化性組成物、パターン形成方法およびパターン
摘要 Disclosed is a to provide a curable composition for imprints capable of keeping a good patternability and of producing less defects even after repetitive pattern transfer. The curable composition for imprints comprising: a polymerizable compound (A); a photo-polymerization initiator (B); and a non-polymerizable compound (C) having a polyalkylene glycol structure having at least one terminal hydroxy group, or at least one etherified terminal hydroxy group, and containing substantially no fluorine atom and no silicon atom.
申请公布号 JP5829177(B2) 申请公布日期 2015.12.09
申请号 JP20120112278 申请日期 2012.05.16
申请人 富士フイルム株式会社 发明人 児玉 邦彦;榎本 雄一郎;臼杵 一幸;大松 禎;北川 浩隆
分类号 H01L21/027;B41M5/00;C08K5/00;C08L71/00 主分类号 H01L21/027
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