Micro-plasma generation using micro-springs

摘要

An ionic wind engine unit for cooling semiconductor circuit assemblies includes a curved micro-spring and an associated electrode that are maintained apart at an appropriate gap distance such that, when subjected to a sufficiently high voltage potential (i.e., as determined by Peek's Law), current crowding at the spring's tip portion creates an electrical field that sufficiently ionizes neutral molecules in a portion of the air-filled region surrounding the tip portion to generate a micro-plasma event. In one engine type the electrode is a metal pad, and in a second engine type the electrode is a second micro-spring. Ionic wind cooling is generated, for example, between an IC die and a base substrate in a flip-chip arrangement, by controlling multiple engines disposed on the facing surfaces to produce an air current in the air gap region separating the IC device and base substrate.

主权项

1. A system for generating a micro-plasma, the system comprising:
a base substrate having a flat surface; a curved micro-spring including an anchor portion disposed parallel to the flat surface of the base substrate, a curved body portion having a first end integrally connected to the anchor portion and curved away from the flat base surface, and a tip portion integrally connected to a second end of the curved body portion, the anchor, body and tip portions comprising an electrically conductive material, wherein the tip portion is fixedly disposed in an air-filled region located above the flat surface; an electrode disposed on or above the flat surface adjacent to the tip portion of the micro-spring such that the tip portion is maintained at a fixed gap distance from the electrode; and a voltage supply coupled to the first electrode and to the anchor portion of the curved micro-spring, the voltage supply including means for generating a plasma-generating voltage across the fixed gap distance between the tip portion of the micro-spring and the electrode such that current crowding at the tip portion creates an electrical field that sufficiently ionizes neutral molecules in a portion of the air-filled region surrounding the tip portion to generate a micro-plasma, wherein the electrode comprises a second curved micro-spring attached to the flat surface of the base substrate adjacent to said curved micro-spring such the fixed gap distance is defined between said tip portion and a second body portion of said second micro-spring; and wherein said voltage supply comprises means for applying said plasma-generating voltage across the fixed gap distance between said micro-spring and the second micro-spring such that said micro-plasma is directed substantially parallel to the flat surface of the base substrate, further comprising a third curved micro-spring attached to the flat surface of the base substrate adjacent to said second curved micro-spring such the second micro-spring is disposed between said curved micro-spring and the third micro-spring, wherein said voltage supply comprises means for applying said plasma-generating voltage across the micro-spring and the second micro-spring during a first time period such that said micro-plasma is generated between the first and second micro-springs during the first time period, and for applying said plasma-generating voltage across the second micro-spring and the third micro-spring during a second time period such that a second micro-plasma is generated between the second and third micro-springs during a second time period.