| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To realize a small-sized piezoelectric vibrating element with high impact resistance in which a CI value is small and spurious vibration in the vicinity thereof is suppressed by a fundamental wave. <P>SOLUTION: A piezoelectric vibrating element 1 comprises: a piezoelectric substrate 10 having a rectangular vibration region 12 and a thick support part 13 integrated with the vibration region 12; excitation electrodes 25a and 25b; and lead electrodes 27a and 27b. The support part 13 comprises: a first support part 14; a second support part 15 continuously provided at one end of the first support part 14; and a third support part 16 continuously provided at other end of the first support part 14. The first support part 14 comprises: a first inclination part 14b whose thickness varies; and a first support part main body 14a having a square pillar shape. At least one slit 20 is provided on the first support part 14. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
