THERMAL EVAPORATION APPARATUS AND METHOD FOR IN LINE TYPE

摘要

Disclosed are a thermal evaporation apparatus of an in-line type and a method thereof. The thermal evaporation apparatus of an in-line type according to an embodiment of the present invention includes a substrate transfer unit which is provided in a chamber and successively transfers substrates to perform a successive deposition process on the substrates; a plurality of evaporation sources which are arranged on an inner side of the chamber and deposits an evaporation material on the substrate by a thermal evaporation method; and a laser unit which is arranged on the back of the evaporation source with regard to a direction of transferring the substrate, and removes the evaporation material deposited on the non-deposition region of the substrate by using a laser.