Methods of forming repeating structures

摘要

Some embodiments include integrated memory having an array of repeating plates across a plurality of nodes. The array includes rows and columns. The plates along individual columns and individual rows alternate between two orientations which are substantially orthogonal to one another. Some embodiments include methods of forming repeating structures. A pattern is formed which includes a lattice of intersecting wavy lines and a box surrounding the lattice. The pattern has a plurality of openings extending therethrough. A liner material is along sidewalls of the openings. The liner material and the pattern are sliced along a row direction and a column direction substantially orthogonal to the row direction. Such slicing subdivides the liner material into a plurality of plates. The plates are within an array comprising columns and rows. The plates along individual columns and individual rows alternate between two orientations which are substantially orthogonal to one another.

主权项

1. A method of forming repeating structures across a plurality of nodes, comprising:
forming a pattern comprising a lattice of intersecting wavy lines and a box surrounding the lattice; the pattern comprising a plurality of openings extending therethrough; forming a liner material along sidewalls of the openings; and slicing the liner material and the pattern along a row direction and a column direction substantially orthogonal to the row direction; such slicing subdividing the liner material into a plurality of plates; the plates being within an array comprising columns and rows; the plates along individual columns alternating between two orientations which are substantially orthogonal to one another, and the plates along individual rows alternating between the two orientations which are substantially orthogonal to one another.