薄膜电晶体基板及其制作方法及显示器;THIN FILM TRANSISTOR SUBSTRATE AND MANUFACTURING METHOD THEREOF AND DISPLAY

摘要

本发明一实施例提供一种薄膜电晶体基板包括：一基板；一闸极，配置于基板上；一闸极绝缘层，配置于基板上并覆盖闸极；一主动层，配置于闸极绝缘层上并位于闸极上方，其中主动层具有一第一氧空缺部分与一第二氧空缺部分；一源极与一汲极，配置于主动层上，源极连接第一氧空缺部分，汲极连接第二氧空缺部分。; a gate disposed on the substrate; a gate insulating layer disposed on the substrate and covering the gate; an active layer disposed on the gate insulating layer and above the gate, and the active layer has a first oxygen vacancy portion and a second oxygen vacancy portion; a source electrode and a drain electrode disposed on the active layer, the source electrode is connected with the first oxygen vacancy portion, and the drain electrode is connected with the second oxygen vacancy portion.