发明名称 |
SEMICONDUCTOR DIE DETACHMENT APPARATUS AND DETACHMENT METHOD THEREOF |
摘要 |
The present invention relates to a semiconductor die separating device and a separating method thereof, more specifically, to a semiconductor die separating device and a separating method thereof which sequentially operates first and second ejecting members after completely peeling a mounting tape of a circumference area of a semiconductor die through a roller unit to prevent defects such as pickup miss or die cracks in case of semiconductor die pickup. |
申请公布号 |
KR20150130595(A) |
申请公布日期 |
2015.11.24 |
申请号 |
KR20140057042 |
申请日期 |
2014.05.13 |
申请人 |
STS SEMICONDUCTOR & TELECOMMUNICATIONS CO., LTD. |
发明人 |
LEE, DUCK SOO;SON, JONG MYOUNG |
分类号 |
H01L21/677;H01L21/78 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|