发明名称 SEMICONDUCTOR DIE DETACHMENT APPARATUS AND DETACHMENT METHOD THEREOF
摘要 The present invention relates to a semiconductor die separating device and a separating method thereof, more specifically, to a semiconductor die separating device and a separating method thereof which sequentially operates first and second ejecting members after completely peeling a mounting tape of a circumference area of a semiconductor die through a roller unit to prevent defects such as pickup miss or die cracks in case of semiconductor die pickup.
申请公布号 KR20150130595(A) 申请公布日期 2015.11.24
申请号 KR20140057042 申请日期 2014.05.13
申请人 STS SEMICONDUCTOR & TELECOMMUNICATIONS CO., LTD. 发明人 LEE, DUCK SOO;SON, JONG MYOUNG
分类号 H01L21/677;H01L21/78 主分类号 H01L21/677
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