Metal amide deposition precursors and their stabilization with an inert ampoule liner

摘要

Described are methods and apparatuses for the stabilization of precursors, which can be used for the deposition of manganese-containing films. Certain methods and apparatus relate to lined ampoules and/or 2-electron donor ligands.

主权项

1. An apparatus for generating a chemical precursor gas, the apparatus comprising:
a canister having a sidewall, a top, and a bottom forming an interior volume; an inlet port and an outlet port in fluid communication with the interior volume; a lining on at least part of the sidewall, top or bottom, wherein the lining comprises an inert metal oxide; and a precursor in the interior volume of the canister, wherein the precursor contains at least one Mn—N bond and a 2-electron donor ligand.