发明名称 Microelectronic Assembly including Built-In Thermoelectric Cooler and Method of Fabricating Same
摘要 A method for fabricating a microelectronic assembly including a built-in TEC, a microelectronic assembly including a built-in TEC, and a system including the microelectronic assembly. The method includes providing a microelectronic device, and fabricating the TEC directly onto the microelectronic device such that there is no mounting material between the TEC and the microelectronic device.
申请公布号 US2015332987(A1) 申请公布日期 2015.11.19
申请号 US201314144179 申请日期 2013.12.30
申请人 Intel Corporation 发明人 Farahani Mohammad M.;Chrysler Gregory;Frutschy Kris
分类号 H01L23/38;H01L23/473;H01L35/32;H01L23/367;H01L25/16;H01L35/02 主分类号 H01L23/38
代理机构 代理人
主权项 1. A microelectronic assembly comprising: a microelectronic device; and a thermoelectric cooler (TEC) coupled to the microelectronic device, wherein the TEC has a thickness range from 50 to 200 microns.
地址 Santa Clara CA US