发明名称 |
High Power Broadband Light Source |
摘要 |
A system for generating high power broadband light includes multiple light-sustained plasma light sources. Each one of the light-sustained sources includes a pumping source, a gas containment structure for containing gas and configured to receive pumping illumination from the pumping source and a parabolic reflector element arranged to collect at least a portion of the broadband radiation emitted by the generated plasma and form a collimated broadband radiation output. The system also including a set of optical elements configured to combine the collimated broadband outputs from the parabolic reflector elements of the multiple light-sustained plasma light sources into an aggregated broadband beam. |
申请公布号 |
US2015333471(A1) |
申请公布日期 |
2015.11.19 |
申请号 |
US201514667235 |
申请日期 |
2015.03.24 |
申请人 |
KLA-Tencor Corporation |
发明人 |
Chimmalgi Anant;Yadav Rahul;Shchemelinin Anatoly;Bezel Ilya;Derstine Matthew |
分类号 |
H01S3/0915;H01S3/00;H05G2/00 |
主分类号 |
H01S3/0915 |
代理机构 |
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代理人 |
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主权项 |
1. A system comprising:
a first light-sustained plasma light source including a first reflector element configured to collect broadband light emitted by a first plasma of the first light-sustained plasma light source, the first light-sustained plasma configured to form a first broadband light output; an additional light-sustained plasma light source including an additional reflector element configured to collect broadband light emitted by an additional plasma of the additional light-sustained plasma light source, the additional light-sustained plasma configured to form an additional broadband light output; and a plurality of optical elements configured to combine the first broadband light output from the first light-sustained plasma light source and the additional broadband light output from the additional light-sustained plasma light source to form an aggregated broadband light beam. |
地址 |
Milpitas CA US |