Cluster tool for microscopic processing of samples
摘要
<p>A cluster tool includes multiple tools (104) for microscopic processing of a sample positioned around a rotatable base (102). A sample holder on the base rotates the sample between the working areas of the tools. A slidable vacuum seal maintains a vacuum in a sample chamber for tools that require a vacuum.</p>
申请公布号
EP1770751(B1)
申请公布日期
2015.11.18
申请号
EP20060121304
申请日期
2006.09.27
申请人
FEI COMPANY
发明人
BUIJSSE, BART;MEUWESE, MARK;BORMANS, BERNARDUS;SLINGERLAND, HENDRIK;TAPPEL, HENDRIK
