| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a concrete configuration of an X-ray inspection heating device capable of uniform convective heating of a substrate without increasing the size of the device or complicating the device.SOLUTION: An X-ray inspection heating device for heating at least one surface of a sample 8 housed in a sample heating chamber 10 by convection and inspecting the sample with X-rays, includes: a planar heater 12 that has a number of ventilation holes 14A, 15A and 16A or slits (13C) formed therein and can transmit X-rays; gas supply means (air ducts 20 and blast pipes 22) that feeds gas into a space on a side of the planar heater 12 opposite to the side with the sample 8; and an X-ray transmission window 24 that blocks the sample heating chamber 10 from outside air.</p> |
