发明名称 マグネトロン用エンドハットおよびその製造方法並びにマグネトロン
摘要 <p>Disclosed is an end hat for magnetrons which is constituted of sintered Mo, characterized in that the surface area ranging from the surface of the sintered Mo to a depth of 100 µm therefrom has a carbon content of 30 ppm or less and the central area ranging from the thickness-direction center of the sintered Mo to distances of ±100 µm therefrom has a carbon content of 50-300 ppm. By reducing the carbon content in the surface area, long-term reliability can be improved. The end hat for magnetrons which has high long-term reliability can be produced in a high yield.</p>
申请公布号 JP5814236(B2) 申请公布日期 2015.11.17
申请号 JP20120524611 申请日期 2011.07.15
申请人 发明人
分类号 H01J23/04;H01J9/04 主分类号 H01J23/04
代理机构 代理人
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