LIGHT INTERFERENCE MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a light interference measurement device that is excellent in robustness.SOLUTION: A light interference measurement device comprises: a light source 201 that emits light with a center wavelength λc; a beam splitter 205 that splits the light from the light source 201 to make the split light incident upon a reference surface 211 and an object 209; a lens 210 that is disposed in an optical path of the light reaching the reference surface 211 from the beam splitter 205; a camera 212 upon which interference light in which light reflected or scattered upon the reference surface 211 interferes with light reflected or scattered upon the object 209 is incident; a movement mechanism 214 that causes the object 209 to move in a first direction in a field of view of the camera 212; a storage unit 215a that stores intensity of the interference light before and after the movement by the movement mechanism 214; and a processing unit 215b that generates an image of the object from a square of a difference between the interference light before and after the movement thereby.