| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type three-dimensional sensor with which it is possible to extend the freedom of a spacer material and formation method, and which is also low cost.SOLUTION: A capacitance type three-dimensional sensor 1 comprises a sheet-like XY direction position detection electrode element 60 for detecting a position in the XY direction, and a Z direction position detection electrode element 20 for detecting a position in the Z direction. The XY direction position detection electrode element 60 is provided with a pair of conductive films 72, 82 for detecting the position in the XY direction, and the Z direction position detection electrode element 20 is provided with a conductive film 22 for detecting the position in the Z direction. Between the XY direction position detection electrode element 60 and the Z direction position detection electrode element 20 are formed a plurality of spacers 50 incapable of elastic deformation and an elastic deformation layer 30 the Shore-A hardness of which at a thickness of 1 cm is 85 or less, the plurality of spacers 50 and the elastic deformation layer 30 facing each other. |
