FILM SUCTION MECHANISM

摘要

A film suction mechanism is provided which can prevent a film-like member from warping or sagging for reliable suction, handing over, or the like of the film-like member. A film suction mechanism of the present invention is a film suction mechanism for processing or transferring a flexible film-like member. The film suction mechanism includes a suction unit having a function of attaching the film-like member thereto by suction and an air nozzle having a function of blowing pressurized air onto a first surface of the film-like member. The suction unit includes a plurality of suction pads. The suction unit is capable of attaching a second surface of the film-like member thereto by suction while the pressurized air is blown onto the first surface of the film-like member.

主权项

1. An apparatus comprising:
a film suction mechanism for holding a flexible film having a first surface and a second surface, comprising:
a suction unit comprising a plurality of suction pads; andan air nozzle configured to blow air onto the flexible film, wherein the suction unit is configured to attach the second surface thereto by suction while the air is blown onto the first surface.