| 发明名称 |
DEVICE AND METHOD FOR ANALYZING DEFECTS BY USING HEAT DISTRIBUTION MEASUREMENT |
| 摘要 |
The present invention provides a method for analyzing defects by using heat distribution measurement, comprising: a sample loading unit for loading a sample to check whether or not there is a defect through heat distribution characteristics; a light source for radiating visible light onto the sample; a power supply unit for generating a driving signal in order to periodically heat the sample; a detection unit for detecting reflected light from the surface of the sample; and a signal generator for synchronizing the detection unit with the driving signal of the power supply unit. |
| 申请公布号 |
US2015316496(A1) |
申请公布日期 |
2015.11.05 |
| 申请号 |
US201314647772 |
申请日期 |
2013.11.26 |
| 申请人 |
KOREA BASIC SCIENCE INSTITUTE |
发明人 |
Chang Ki Soo;Ryu Seon Young;Choi Woo June;Kim Geon Hee |
| 分类号 |
G01N25/72 |
主分类号 |
G01N25/72 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A defect analysis apparatus using heat distribution measurement, the apparatus comprising:
a sample loading unit configured to load a sample to determine whether or not there is a defect through heat distribution characteristics; a light source configured to radiate light onto the sample; a power supply unit configured to generate a driving signal in order to periodically heat the sample at a defect point of the sample; a first detection unit configured to detect light reflected from a surface of the sample; and a signal generator configured to synchronize the first detection unit with the driving signal of the power supply unit. |
| 地址 |
Daejeon KR |
