| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a multilayer antireflection film having low reflectivity and having an antireflection property for a beam in a wide wavelength range, at high productivity and low cost. <P>SOLUTION: The method for manufacturing a multilayer antireflection film having a metal oxide porous body in which meso holes form a cubic phase, comprises: applying in an overlapping manner sol-gel reaction solutions of a metal oxide precursor, having different concentrations of terminal branch type copolymer particles onto a base material and drying the applied solutions to form a multilayered organic inorganic composite layer on the base material; and then removing the terminal branch type copolymer particles by sintering, and the like. <P>COPYRIGHT: (C)2013,JPO&INPIT |
