发明名称 可動基板上に過渡熱プロファイル処理を提供するための装置
摘要 <p>An apparatus for curing thin films is disclosed. The apparatus includes a computer control system, a conveyance system, a flashlamp controller, and a flashlamp. The curing apparatus also includes a high average power, low-inductance cable connected between the flashlamp controller and the flashlamp. The low-inductance cable is smaller in diameter and is more flexible than the prior art and includes at least one liquid cooling line and multiple forward and return path wires interleaved in a regular hexagonal closed packed configuration such that every wire is adjacent to at least one cooling line and at least one wire of opposite polarity.</p>
申请公布号 JP5802739(B2) 申请公布日期 2015.11.04
申请号 JP20130503973 申请日期 2011.04.08
申请人 发明人
分类号 F26B13/10;B05C9/14;F26B3/28;F26B23/04 主分类号 F26B13/10
代理机构 代理人
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