发明名称 METHOD OF TRANSFERRING A THIN FILM ONTO A SUPPORT
摘要 <p>A method of transferring a thin film onto a first support, includes supplying a structure comprising a film of which at least one part originates from a solid substrate of a first material and which is solidly connected to a second support having a thermal expansion coefficient that is different from that of the first material and close to that of the first support, forming an embrittled area inside the film that defines the thin film to be transferred, affixing the film that is solidly connected to the second support to the first support, and breaking the film at the embrittled area.</p>
申请公布号 EP1922752(B1) 申请公布日期 2015.11.04
申请号 EP20060794326 申请日期 2006.08.11
申请人 COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES 发明人 DEGUET, CHRYSTEL;CLAVELIER, LAURENT;DECHAMP, JÉRÔME
分类号 H01L21/762 主分类号 H01L21/762
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