| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing an ingot which improves the quality of a manufacturing polycrystal silicon ingot.SOLUTION: An apparatus 1 for manufacturing an ingot includes a cast mold 9, and a cooling rod 19. The cast mold 9 is provided with a container 12 having a first hollow part 14 which opens upward, and a penetrated hole 15 which opens at a center part of a bottom face of the first hollow part 14, and a hollow rod-like member 13 fixed at the center part of the bottom face of the first hollow part 14 of the container 12 and having a second hollow part 16 which opens downward and overlaps with the penetrated hole 15. The second hollow part 16 has a dimension corresponding to a thickness of a tip end part of the cooling rod 19, and reaches to the vicinity of an upper end of the hollow rod-like member 13. The tip end part of the cooling rod 19 is inserted to the second hollow part 16 through the penetrated hole 15, and an outer peripheral face of the cooling rod 19 contacts to an inner peripheral face of the second hollow part 16 over an entire circumference. The quality of a manufacturing polycrystal silicon ingot can be thereby improved. |
