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发明名称
用于基板对准之装置,用于具有该基板对准之装置的基板处理之装置,及基板对准方法
摘要
申请公布号
TWI506720
申请公布日期
2015.11.01
申请号
TW099119150
申请日期
2010.06.11
申请人
周星工程股份有限公司
发明人
李相敦;刘致旭
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
一种用于基板对准之装置,其包含:一腔室,其提供一内部空间;一基座,其在该腔室之该内部空间中经驱动上下移动;及一水平转移单元,其经组态以藉由一操作性联合该基座之该上下移动而水平移动的多级驱动单元来驱动而使一基板与一遮罩对准,其中该水平转移单元包含:一基板推针,其推动该基板之一侧面;一遮罩推针,其推动该遮罩之一侧面;及一推针固定主体,其包含一连接至该遮罩推针之上部以及一连接至该基板推针之下部。
地址
南韩
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