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经营范围
发明名称
电子组件及其制造方法
摘要
申请公布号
TWI506740
申请公布日期
2015.11.01
申请号
TW102128472
申请日期
2013.08.08
申请人
东芝股份有限公司
发明人
斋藤友博
分类号
H01L23/12;H01L23/48
主分类号
H01L23/12
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
一种电子组件,包含:基板;功能性元件,其被形成于该基板上;第一层,其被组态以形成将该功能性元件储存于该基板上之腔室,该第一层具有通孔,该第一层在其上表面上具有第一凹陷部及第一突出部,且该第一层在垂直于该基板的表面之方向上具有不同的膜厚度;及第二层,其被形成于该第一层上,且被组态以将该等通孔封闭。
地址
日本
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