IMAGE SENSORS INCLUDING DEPOSITED NEGATIVE FIXED CHARGE LAYERS ON PHOTOELECTRIC CONVERSION REGIONS AND METHODS OF FORMING THE SAME

摘要

A method of forming an image sensor can be provided by forming a respective photoelectric conversion region in each of a plurality of unit pixel regions of a substrate and depositing a material configured to provide a negative fixed charge layer on the photoelectric conversion region.

主权项

1. An image sensor comprising:
a substrate including a first surface, a second surface opposite to the first surface, and a plurality of unit pixel regions, wherein the second surface is configured to receive incident light; a photoelectric conversion region included in each of the unit pixel regions; and a negative fixed charge layer on the first surface or on the second surface, wherein the negative fixed charge layer includes a metal fluoride.