发明名称 EXAMINATION DEVICE
摘要 This examination device is provided with: an illumination optical system for supplying light to a test sample; a first detection optical system positioned at a first elevation angle; and a second detection optical system positioned at a second elevation angle higher than the first elevation angle. The second detection optical system includes an odd number of detection optical units.
申请公布号 WO2015163029(A1) 申请公布日期 2015.10.29
申请号 WO2015JP57250 申请日期 2015.03.12
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION 发明人 KATO YUICHIRO;SUZUKI KATSUYA;OKA KENJI;MITSUI HIDEO;SAITO SHOTA;TAGUCHI JUNICHI
分类号 G01N21/956 主分类号 G01N21/956
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