METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL

摘要

A vapor delivery vessel for vaporizing and delivering vaporized source material is disclosed. The vapour delivery vessel comprises a peripheral vessel wall bounding an interior volume, a gas outlet arranged in fluid communication with the interior volume; andat least one support structure disposed within the interior volume and adapted to support vaporizable solid source material within the interior volume. The at least one support structure is disposed within the interior volume and comprises any of (i) at least partially permeable material, (ii) a mesh structure, (iii) a metal wool material, and (iv) a porous body.