OXIDE SINTERED BODY AND SPUTTERING TARGET, AND METHOD FOR MANUFACTURING SAME

摘要

The Li-containing transition metal oxide sintered compact of the present invention includes Li and a transition metal, and further includes Al, Si, Zr, Ca, and Y as impurity elements, of which contents are controlled to the following ranges: Al ‰¤ 90 ppm; Si ‰¤ 100 ppm; Zr ‰¤ 100 ppm; Ca ‰¤ 80 ppm; and Y ‰¤ 20 ppm, wherein the sintered compact has a relative density of 95% or higher and a specific resistance of lower than 2 x 10 7 © cm. The present invention makes it possible to stably form Li-containing transition metal oxide thin films useful as the positive electrode thin films of secondary batteries or the like at a high deposition rate without causing abnormal discharge.