System and method for recycling high-boiling-point waste photoresist stripper

摘要

In a system for recycling a high-boiling-point waste photoresist stripper generated in processes of manufacturing LCDs or semiconductor devices, wherein an expensive high-boiling-point stripper solvent can be easily recycled at high yield and high-purity electronic grade. This system includes a first distillation device for removing low-boiling-point impurities, a second distillation device for recycling a stripper solvent composition while removing high-boiling-point impurities, a third distillation device for removing trace water, thus recovering the stripper solvent composition, a fourth distillation device for additionally recycling a stripper solvent, thus additionally recovering a high-boiling-point stripper solvent, and a fifth distillation device for sequentially and separately recovering the stripper solvent composition recovered by the second distillation device and the high-boiling-point stripper solvent additionally recovered by the fourth distillation device.

主权项

1. A system for recycling a high-boiling-point waste photoresist stripper, the system comprising:
a first distillation device comprising a first feed inlet configured to receive the high-boiling-point waste photoresist stripper, the first distillation device configured to remove low-boiling-point impurities from the high-boiling-point waste photoresist stripper; a second distillation device comprising a second feed inlet being connected to a bottom outlet of the first distillation device, the second distillation device configured to
remove high-boiling-point impurities from the high boiling-point waste photoresist stripper without the low-boiling-point impurities, andsimultaneously recover a stripper solvent composition; a third distillation device being connected to a top outlet of the second distillation device, and configured to remove trace water from the stripper solvent composition without the high-boiling-point impurities; and a fourth distillation device connected to a bottom outlet of the second distillation device, and configured to perform second stripper recycling by additionally recovering a high-boiling-point stripper solvent from a high-boiling-point residue including the high-boiling-point impurities discharged by the second distillation device; a fifth distillation device connected to the top outlet of the second distillation device, connected to a top outlet of the fourth distillation device, and configured to perform third stripper recycling by sequentially and separately recovering, as individual high-purity electronic grade recycled stripper solvents, the stripper solvent composition recovered by the second distillation device and the high-boiling-point stripper solvent additionally recovered by the fourth distillation device, based on a boiling point of each stripper solvent of the stripper solvent composition.