PLASMA REACTOR FOR PURIFYING EXHAUST GAS OF THE PROCESS FACILITY

摘要

The present invention relates to a plasma reactor and provides the plasma reactor arranged between a process chamber and a vacuum pump to decompose exhaust gas discharged from the process chamber, comprising: a conduit through which the exhaust gas flows; a first electrode part installed on the conduit; a second electrode part arranged to be spaced from the first electrode part and causing plasma discharge with the first electrode part to decompose the exhaust gas; a housing wrapping the conduit and forming a separated space with the outer circumference of the conduit; a sensing unit sensing environmental conditions of the conduit or the separated space; and a control unit determining the state of the conduit or the separated space from the information on the environmental conditions received from the sensing unit.