发明名称 画質調整方法、プログラムおよび電子顕微鏡
摘要 In accordance with an embodiment, a method of adjusting quality of an image of patterns common in shape includes acquiring a first gray value and a first waveform within a reference image, acquiring a sample image, acquiring a second gray value and a second waveform from third and fourth regions within a sample image, respectively, and adjusting the brightness and contrast of the sample image. The first gray value is a standard for the brightness of the image from a first region within a reference image. The first and second waveforms represent a luminance profile of second and fourth regions including edges, respectively. The third and fourth regions correspond to the first and second regions. The brightness and contrast of the sample image are adjusted by matching the first gray value and the first waveform with the second gray value and the second waveform.
申请公布号 JP5798099(B2) 申请公布日期 2015.10.21
申请号 JP20120194956 申请日期 2012.09.05
申请人 株式会社東芝 发明人 石 井 多加志;濱 口 晶
分类号 H01J37/22;G06T1/00;H01L21/66 主分类号 H01J37/22
代理机构 代理人
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