发明名称 半導体装置およびその製造方法
摘要 A semiconductor device that is equipped with a semiconductor substrate, a composite metal film, and a detection terminal is provided. The composite metal film is formed on a surface or a back face of the semiconductor substrate, and has a first metal film, and a second metal film that is joined to the first metal film and is different in Seebeck coefficient from the first metal film. The detection terminal can detect a potential difference between the first metal film and the second metal film.
申请公布号 JP5796631(B2) 申请公布日期 2015.10.21
申请号 JP20130532358 申请日期 2011.09.07
申请人 トヨタ自動車株式会社 发明人 水野 義人
分类号 H01L35/20;G01K7/02;H01L27/04;H01L29/739;H01L29/78;H01L35/34 主分类号 H01L35/20
代理机构 代理人
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