Recipe management apparatus and recipe management method

摘要

According to one embodiment, a recipe management apparatus for comparing recipes prescribing process conditions of processing apparatuses between a plurality of the processing apparatuses having the same type. The recipe management apparatus includes a recipe reading unit, a mask unit, and a determination unit. The recipe reading unit is configured to read binary-format recipes of the plurality of processing apparatuses. The mask unit is configured to apply masks to data of the recipes based on mask position information prescribing positions which are applied with the masks in binary-format data of the recipes. The determination unit is configured to compare the plurality of recipes applied with the masks, and configured to determine whether there is a difference.

主权项

1. A recipe management apparatus for comparing recipes prescribing process conditions of processing apparatuses between a plurality of the processing apparatuses having the same type, comprising:
a recipe reading unit configured to read binary-format recipes of the plurality of processing apparatuses; a mask unit configured to apply masks to data of the recipes based on mask position information prescribing mask positions which are applied with the masks in binary-format data of the recipes; and a determination unit configured to compare a plurality of the recipes applied with the masks, and configured to determine whether there is a difference in which a mask position storage unit configured to store the mask position information; and a mask position registration unit configured to register the mask position information in the mask position storage unit, wherein the plurality of recipes include: an original recipe which is optimized with respect to a reference processing apparatus among the plurality of processing apparatuses; and recipe data which is produced by optimizing recipe data copied from the original recipe with respect to processing apparatuses other than the reference processing apparatus among the plurality of processing apparatuses, wherein the mask position registration unit compares the original recipe and the comparison recipe read by the recipe reading unit in a binary level, and in the case where a difference of the recipe with respect to the original recipe is allowable, the mask position registration unit registers the difference as mask position information, and in the case where the difference is not allowable, the mask position registration unit does not register the difference as mask position information.