具有堆叠支撑环之晶圆运送器;WAFER SHIPPER WITH STACKED SUPPORT RINGS

摘要

本发明提供一种晶圆运送器，在该晶圆运送器中利用晶圆支撑环来支撑各别晶圆。晶圆支撑环可支撑各种厚度之晶圆而不会影响堆叠之高度，并且在一撞击事件期间使常驻晶圆容纳于环内。晶圆与环相互配合以在各晶圆之间界定空隙，该等空隙在一撞击事件中充当缓冲垫以阻尼在撞击事件期间对晶圆之冲击。同样地，某些实施例包含用于在堆叠之最上晶圆与最下晶圆之间界定封闭之气腔的结构以阻尼一撞击之影响。各种实施例包含防止晶圆在一撞击事件期间「跳」出晶圆支撑环之结构。某些实施例包含用于支撑晶圆平面之结构。 A wafer shipper utilizing wafer support rings for supporting individual wafers therein. The wafer support rings can support wafers of various thicknesses without affecting the height of the stack, and provide containment of the resident wafers within the rings during an impact event. The wafers and the rings cooperate to define voids between the wafers that act as cushions in an impact event for dampening the shock imparted on the wafers during an impact event. Likewise, some embodiments include structure that defines enclosed gas pockets between the uppermost and the lowermost wafers of the stack for dampening the effects of an impact. Various embodiments include structure that prevents wafers from 「jumping」