发明名称 Integrated Memory and Methods of Forming Repeating Structures
摘要 Some embodiments include integrated memory having an array of repeating plates across a plurality of nodes. The array includes rows and columns. The plates along individual columns and individual rows alternate between two orientations which are substantially orthogonal to one another. Some embodiments include methods of forming repeating structures. A pattern is formed which includes a lattice of intersecting wavy lines and a box surrounding the lattice. The pattern has a plurality of openings extending therethrough. A liner material is along sidewalls of the openings. The liner material and the pattern are sliced along a row direction and a column direction substantially orthogonal to the row direction. Such slicing subdivides the liner material into a plurality of plates. The plates are within an array comprising columns and rows. The plates along individual columns and individual rows alternate between two orientations which are substantially orthogonal to one another.
申请公布号 US2015295173(A1) 申请公布日期 2015.10.15
申请号 US201414250114 申请日期 2014.04.10
申请人 Micron Technology, Inc. 发明人 Rigano Antonino
分类号 H01L45/00 主分类号 H01L45/00
代理机构 代理人
主权项
地址 Boise ID US