| 摘要 |
The invention relates to a VCSEL structure based on a novel grating reflector. The grating reflector comprises a grating layer with a contiguous core grating region having a grating structure, wherein an index of refraction of high-index sections of the grating structure is at least 2.5, and wherein an index of refraction of low-index sections of the grating structure is less than 2. The core grating region defines a projection in a direction normal to the grating layer. The grating reflector further comprises a cap layer abutting the grating layer, and an index of refraction of the cap layer within the projection of the core grating region onto the cap layer is at least 2.5, and within the projection of the core grating region, the cap layer is abutted by a first solid dielectric low-index layer, an index of refraction of the first low-index layer or air being less than 2; and within the projection of the core grating region, the grating layer is also abutted by a second low-index layer and/or by air, an index of refraction of the second low-index layer or air being less than 2. The VCSEL structure furthermore comprises a first reflector and an active region for providing a cavity and amplification. |
