MEMS JET INJECTION STRUCTURE FOR HIGH DENSITY PACKAGING

摘要

PROBLEM TO BE SOLVED: To provide a liquid injector which enables electric connection of a droplet injection module on a die having an area which is reduced resulting from improvement of the nozzle density in the droplet injection module and utilized for electric connection.SOLUTION: A liquid injector 100 includes a liquid injection module 103 having a substrate 122 and a layer separated from the substrate. The substrate includes multiple liquid injection elements 401 arranged in a matrix. Each liquid injection element is formed so as to cause a liquid to be emitted from a nozzle. The layer separated from the substrate has multiple electric connections. Each electric connection is located adjacent to the corresponding liquid injection element.