发明名称 METHOD FOR SLICING WAFERS FROM A WORKPIECE USING A SAWING WIRE
摘要 The present invention relates to a method for slicing wafers from a workpiece by using a sawing wire wherein at least two wire guide rolls clamp a wire web. Each wire guide roll comprises a plurality of grooves on a horizontal surface of each wire guide roll wherein at least one groove into which a wire is not inserted during wire sawing is in parallel with a wire-guide groove and sawing wires are wound respectively on previously unoccupied grooves which are not abraded or used after abrasion of wire-guide grooves or a defined number of sawing processes.
申请公布号 KR20150115660(A) 申请公布日期 2015.10.14
申请号 KR20150047011 申请日期 2015.04.02
申请人 SILTRONIC AG 发明人 CLAUDIA REINHARDT
分类号 H01L21/78;H01L23/00 主分类号 H01L21/78
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